By Jörg Eichholz, Torgny Brogårdh (auth.), Dan Zhang (eds.)
Advanced Mechatronics and MEMS Devicesdescribes cutting-edge MEMS units and introduces the most recent expertise in electric and mechanical microsystems. The evolution of layout in microfabrication, in addition to rising matters in nanomaterials, micromachining, micromanufacturing and microassembly are all mentioned at size during this quantity. complicated Mechatronics additionally presents a reader with wisdom of MEMS sensors array, MEMS multidimensional accelerometer, man made pores and skin with imbedded tactile elements, in addition to different issues in MEMS sensors and transducers. The booklet additionally offers a few issues in complex robotics and an abundance of functions of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug supply and flying robots with adjustable wings, to call a few.
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The main focus of this research is to develop new actuator devices that cover the applications for which conventional actuators are not suitable; piezoelectric actuators could provide fast, zero backlash, silent (gearless), and energy-efficient actuation in a compact body. Piezoelectric materials are known to have two major piezoelectric effects that make them useful for both actuation and sensing [18, 19, 21, 25, 28]. A piezoelectric material generates electric charges on its surfaces when stress is applied.
21 Fig. 24 Graphical user interface to be used for measurements on the individual resistors as well as for calculating the applied forces and torques One of four connectors to the F/T-sensor Plug for programming µController Multiplexers Power supply connection USB-port Fig. 25 PCB of the final demonstrator J. Eichholz and T. Broga˚rdh 22 Fig. 26 Example of two windows showing the measured forces and torques “Unbias” shows the true resistor values. With “graph” a graph as Fig. 26 indicates will show all measured resistor values in real time.
We derive then the autocalibration procedure in the context of maximum likelihood estimate and we provide examples of calibrations. For each calibrated sensor, we also illustrate how to derive the accuracy on the estimated parameters through the covariance analysis and how to compute the angles between the sensing axes of the sensor. In the conclusion, we summarize the main aspects involved in the autocalibration of MEMS accelerometers. 1 Introduction The advent of microelectromechanical system (MEMS) technology has allowed miniaturized, high performance and cheap accelerometers to be built using a variety of different approaches [1–3].
Advanced Mechatronics and MEMS Devices by Jörg Eichholz, Torgny Brogårdh (auth.), Dan Zhang (eds.)